SEMI has released eight new technology standards for the semiconductor, MEMS , FPD and photovoltaic manufacturing industries. These new standards were developed by the technical experts of the equipment material suppliers and device manufacturers involved in the SEMI international standard project.
The new standards are:
SEMI T20.3, Service Communication Specification for the Identification of Semiconductors and Related Products
SEMI E158, Mechanical Specification for Wafer Handling Equipment for Transfer and Storage of 450mm Wafers
SEMI M 76,450mm Polished Monocrystalline Wafer Development Specification
SEMI D60, FPD polarizing film and material surface scratch resistance test method
SEMI E 156,450mm wafer storage transfer interface mechanical specification
SEMI E157, Specification for Module Process Tracking
SEMI D59, 3D display terminology
SEMI PV4, Specification for Fifth Generation Substrate Size Ranges for Thin Film Photovoltaics
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